• 专利标题:   Method for forming horizontal graphene PN junction on thin film crystal of semiconductor device, involves preparing layer of graphite or graphene on silicon carbide substrate, and providing doped graphite alkene with n-type doped grapheme.
  • 专利号:   CN103280398-A, CN103280398-B
  • 发明人:   WANG J, LI J, LIU Q, WEI C, FENG Z, SONG X, HE Z
  • 专利权人:   CHINA ELECTRONICS TECHNOLOGY GROUP CORP, 13TH RES INST CHINA ELECTRONIC SCI TEC
  • 国际专利分类:   H01L021/18
  • 专利详细信息:   CN103280398-A 04 Sep 2013 H01L-021/18 201377 Pages: 8 Chinese
  • 申请详细信息:   CN103280398-A CN10208785 30 May 2013
  • 优先权号:   CN10208785

▎ 摘  要

NOVELTY - The method involves preparing a layer of graphite or graphene on a silicon carbide substrate. Doped graphite alkene is provided with n-type doped grapheme. P-type doped graphene area pre-deposition is obtained by a P-type doped element. Annealing time and passivation temperature are controlled by a graphene transverse P/N junction, where passivation temperature is 400-1000 degrees Celsius and time is 1-120 hours. A mask layer is made of Si3N4 or SiO2. The P-type doped element is made of germanium, silicon and gold. The passivation temperature is 400-1000 degrees Celsius and time is l-120hours. USE - Method for forming a horizontal graphene PN junction on a thin film crystal of a semiconductor device. ADVANTAGE - The method ensures simple operation. DESCRIPTION OF DRAWING(S) - The drawing shows a block diagram illustrating a horizontal graphene PN junction forming method.'(Drawing includes non-English language text)'