▎ 摘　　要

NOVELTY - Producing a transition metal chalcogen compound comprises forming a graphene thin film including at least two graphene layers on a substrate, and forming a transition metal chalcogen compound on the graphene thin film from a transition metal precursor and a chalcogen precursor using atomic layer deposition to form a transition metal chalcogen compound thin film. USE - The transition metal chalcogen compound is useful in semiconductor devices e.g. transistors and flexible transistor devices. ADVANTAGE - The transition metal chalcogen compound: has flexible and transparent properties and improved crystallinity. The method is fast.