• 专利标题:   Sensor device, such as Hall sensor device for measuring magnetic field strength components, comprises magneto-resistive sensor device arranged on first substrate surface or on intermediate layer partially covering substrate surface.
  • 专利号:   DE102021214706-A1, WO2023117452-A1
  • 发明人:   SCHELLING C, KOEPERNIK C, UHLIG R P
  • 专利权人:   BOSCH LLC ROBERT, BOSCH GMBH ROBERT
  • 国际专利分类:   G01R033/02, H10N050/10, H10N052/00, G01R033/00, G01R033/07, G01R033/09
  • 专利详细信息:   DE102021214706-A1 22 Jun 2023 H10N-050/10 202354 German
  • 申请详细信息:   DE102021214706-A1 DE10214706 20 Dec 2021
  • 优先权号:   DE10214706

▎ 摘  要

NOVELTY - The sensor device comprises a magneto-resistive sensor device (12) arranged on a first substrate surface (10a) or on an intermediate layer partially covering the substrate surface. A Hall sensor device (14) is arranged on the surface or the intermediate layer with second substrate surface aligned in a sensing direction. The sensor device determines a value of a direction-dependent physical variable in the first sensing direction (12a) using the Hall device. The Hall device includes a sensing material layer made of sensing material, such as graphene, in which Hall voltage or Hall current is induced by an external magnetic field, where the layer is formed from the sensing material. USE - Sensor device, such as Hall sensor device and magnetoresistive sensor device, for measuring magnetic field strength components. ADVANTAGE - The sensor device has good sensitivity, high measurement accuracy and low noise. The sensor device can be produced relatively inexpensively due to the combination of two different sensor technologies on the same substrate. The sensing material layer can be formed from the sensing material graphene, which has high electron mobility, good mechanical flexibility and comparatively high stability at the molecular level. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for manufacturing a sensor device. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a sensor device for measuring magnetic field strength components. 10aFirst substrate surface 12Magneto-resistive sensor device 12aFirst sensing direction 14Hall sensor device 14aSecond sensing direction