• 专利标题:   Large-area metal nanoparticle array graphene-assisted preparation method, involves fixing graphene layer on substrate, precipitating metal atoms to surface of nano-pillar, and arranging metal nanoparticles on surface of substrate.
  • 专利号:   CN110844876-A
  • 发明人:   XU C, DONG Y, XIE Y, SUN J, HU L
  • 专利权人:   UNIV BEIJING TECHNOLOGY
  • 国际专利分类:   B81B007/04, B81C001/00
  • 专利详细信息:   CN110844876-A 28 Feb 2020 B81B-007/04 202024 Pages: 14 Chinese
  • 申请详细信息:   CN110844876-A CN11136443 19 Nov 2019
  • 优先权号:   CN11136443

▎ 摘  要

NOVELTY - The method involves preparing a substrate (101) required for metal ion implantation. Silicon dioxide nanosphere transferring method is utilized to transfer silicondioxide nanosphere to a surface of the substrate. Vertical dry etching process is performed on the surface of the substrate by utilizing the silicon dioxide nanosphere as a mask. The silicon dioxide nanosphere on a top surface of the nano-pillar is removed from the surface of the substrate by utilizing deionized water ultrasound method. A graphene layer is fixed on the surface of the substrate by utilizing wet transfer method. Metal atoms are precipitated to the top surface of the nano-pillar. Metal nanoparticles are arranged on the surface of the substrate in a periodic manner. USE - Large-area metal nanoparticle array graphene-assisted preparation method. ADVANTAGE - The method enables utilizing graphene as a barrier to prevent evaporation of the metal atoms, performing periodic surface treatment to arrange the metal nanoparticles in a periodic manner, so that a metal nanoparticle array with adjustable structure arrangement is obtained, protecting prepared graphene by the metal nanoparticles so as to avoid contact with air, so that prolonged-term stability of the metal nanoparticles is ensured in an effective manner. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a metal nanoparticle array. (Drawing includes non-English language text). Substrate (101)