• 专利标题:   Construction method of highly sensitive position detector based on graphene/germanium composite film, involves fabricating electrodes on sample to obtain highly sensitive position detector based on graphene/germanium composite film.
  • 专利号:   CN111883607-A
  • 发明人:   CUI D, CAI B, WANG D, JIN C
  • 专利权人:   SHANGHAI NAT ENG RES CENT NANOTECHNOLOGY
  • 国际专利分类:   H01L031/0216, H01L031/028, H01L031/101, H01L031/18
  • 专利详细信息:   CN111883607-A 03 Nov 2020 H01L-031/101 202099 Pages: 8 Chinese
  • 申请详细信息:   CN111883607-A CN10668120 13 Jul 2020
  • 优先权号:   CN10668120

▎ 摘  要

NOVELTY - The method involves transferring the graphene film prepared by chemical vapor deposition to germanium film and germanium wafer to obtain graphene/germanium sample. The graphene/germanium sample is placed on the heating plate and heat it at 30-80 degrees C for 5-20min for pretreatment. The graphene/germanium sample is put into a vacuum oven and take out the sample after annealing at 50-120 degrees C for 15-30min. Electrodes on the sample are fabricated to obtain a highly sensitive position detector based on the graphene/germanium composite film. Gold/titanium are deposited. USE - Construction method of highly sensitive position detector based on graphene/germanium composite film. ADVANTAGE - The method successfully constructed a graphene/germanium composite film-based high-sensitivity position detector with ideal response to visible light. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a highly sensitive position detector based on graphene/germanium composite film. DESCRIPTION OF DRAWING(S) - The drawing shows a graphical view of the current-voltage curve. (Drawing includes non-English language text)