• 专利标题:   Graphene belt based spin valve contains edged carbon atoms as graphene nanometer belt spin transport channel, and is prepared by cleaning doped silicon substrate and applying silicon dioxide layer on silicon substrate.
  • 专利号:   CN103490007-A, CN103490007-B
  • 发明人:   WANG P, ZHOU P, ZHANG W, SUN Q, WANG L
  • 专利权人:   UNIV FUDAN
  • 国际专利分类:   B82Y030/00, C01B031/04, G11C011/16, H01L043/12
  • 专利详细信息:   CN103490007-A 01 Jan 2014 H01L-043/12 201418 Pages: 7 Chinese
  • 申请详细信息:   CN103490007-A CN10449102 28 Sep 2013
  • 优先权号:   CN10449102

▎ 摘  要

NOVELTY - Graphene belt based spin valve contains edged carbon atoms as graphene nanometer belt spin transport channel. USE - Graphene belt based spin valve. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for preparing graphene belt based spin valve, which involves: (A) cleaning doped silicon substrate; (B) applying silicon dioxide layer on the silicon substrate, which is transferred on graphene; (C) obtaining a layer of photoresist mask plate by etching graphene using electron beam photo-etching; (D) hydrogenating the edge of carbon atoms using hydrogen plasma etching; (E) obtaining a second layer of photoresist mask plate using electron beam photo-etching; (F) etching the graphene and carbon edge i.e. bonded with oxygen using oxygen plasma etching; and (G) hydrogenating carbon atoms using magnetic electrode.