• 专利标题:   Method for preparing graphene radiating fin, involves depositing silicon dioxide on surface of copper layer and placing acetylene, hydrogen and argon gas into reaction chamber followed by removing polymethyl methacrylate using acetone.
  • 专利号:   CN103219250-A
  • 发明人:   LIU J
  • 专利权人:   UNIV SHANGHAI
  • 国际专利分类:   H01L021/48
  • 专利详细信息:   CN103219250-A 24 Jul 2013 H01L-021/48 201418 Pages: 6 Chinese
  • 申请详细信息:   CN103219250-A CN10118977 08 Apr 2013
  • 优先权号:   CN10118977

▎ 摘  要

NOVELTY - A graphene radiating fin preparation method involves depositing silicon dioxide on a surface of a copper layer. Acetylene, hydrogen and argon gas are placed into a strong Black Magic deposition system reaction chamber. Graphene is grown on the surface of silicon dioxide. The copper layer is spin-coated with polymethyl methacrylate and corroded using ferric trichloride. The copper layer spin coated with the polymethyl methacrylate is transferred to a target graphene chip. The polymethyl methacrylate is removed using acetone to obtain the graphene radiating fin. USE - Method for preparing graphene radiating fin. ADVANTAGE - The method enables preparing graphene radiating fin with high specific surface area, high thermal conductivity, high thermal stability and high elasticity, in a simple and efficient manner. DETAILED DESCRIPTION - A graphene radiating fin preparation method involves depositing silicon dioxide on a surface of 1 micron thick copper layer using an electron beam evaporation method. Acetylene, hydrogen and argon gas are placed into a strong Black Magic deposition system reaction chamber and reacted at 900 degrees C for 5-10 minutes. Graphene is grown on the surface of silicon dioxide by a chemical vapor deposition process. The copper layer is spin-coated with 300 nm polymethyl methacrylate through a cooling treatment. The copper layer is corroded using 30% ferric trichloride for 20 minutes. The copper layer spin coated with the polymethyl methacrylate is transferred to a target graphene chip. The polymethyl methacrylate is removed using acetone to obtain the graphene radiating fin, where purity of the copper is 99.9%, and acetylene flow rate is 5-10 standard cubic centimeters per minute (sccm).