▎ 摘　　要

NOVELTY - The MEMS structure (100) includes epitaxial polysilicon cap (110) located above the substrate. A first graphene component has at least one graphene surface immediately adjacent to the first cavity portion defined between the substrate and the epitaxial polysilicon cap. USE - MEMS structure e.g. for gyroscopes, resonators and accelerometers. ADVANTAGE - Provides reliable MEMS device that is compatible with the MEMS fabrication processes that can be used to reduce stiction forces, surface charges and/or resistivity of the MEMS structure. Graphene is incorporated into the MEMS structure easily without excessive modification of know manufacturing techniques and processes. Aids in keeping the graphene pristine to optimize the quantum, electronic and thermal properties of the graphene since graphene is easily contaminated. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for forming MEMS structure. DESCRIPTION OF DRAWING(S) - The drawing is the cross sectional view of the simplified MEMS structure including motion detector and pressure detector incorporating graphene components. MEMS structure (100) Silicon handle layer (102) Silicon oxide layer (104) Device layer (106) Epitaxial polysilicon cap (110)