• 专利标题:   Hetero-junction carbon nanotube FET, has source electrode fixed with outer side of graphene and carbon nanotube contact, and drain electrode formed above semiconductor carbon nano-tube that is fixed with drain terminal.
  • 专利号:   CN106356405-A
  • 发明人:   PENG L, QIU C, XU L, ZHANG Z
  • 专利权人:   BEIJING HUATANYUANXIN ELECTRONIC TECHNOL
  • 国际专利分类:   H01L021/336, H01L029/06, H01L029/10, H01L029/78
  • 专利详细信息:   CN106356405-A 25 Jan 2017 H01L-029/78 201717 Pages: 15 Chinese
  • 申请详细信息:   CN106356405-A CN10806633 06 Sep 2016
  • 优先权号:   CN10806633

▎ 摘  要

NOVELTY - The FET has a gate structure provided with a gate dielectric unit and a gate electrode. The gate electrode is arranged on the gate dielectric unit. The gate structure covers a graphene and carbon nanotube contact. A source electrode and a drain electrode are respectively located with two sides of the gate structure. The source electrode is fixed with an outer side of the graphene and carbon nanotube contact. The drain electrode is formed above a semiconductor carbon nano-tube that is fixed with a drain terminal. USE - Hetero-junction carbon nanotube FET. ADVANTAGE - The FET selects transistor source-drain metal to control polarity of the source and drain electrodes of a n-type field effect transistor. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a hetero-junction carbon nanotube FET manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a hetero-junction carbon nanotube FET.