• 专利标题:   Electronic apparatus, particularly graphene transistor, comprises electrode electrically connected to graphene film, where graphene film has portion whose density of states is higher than another portion in connection portion with electrode.
  • 专利号:   JP2014203929-A, JP6268419-B2
  • 发明人:   HARADA N
  • 专利权人:   DOKURITSU GYOSEI HOJIN SANGYO GIJUTSU SO, FUJITSU LTD
  • 国际专利分类:   H01L021/28, H01L029/786, H01L051/05, H01L051/30, H01L051/40
  • 专利详细信息:   JP2014203929-A 27 Oct 2014 H01L-029/786 201472 Pages: 15 Japanese
  • 申请详细信息:   JP2014203929-A JP077891 03 Apr 2013
  • 优先权号:   JP077891

▎ 摘  要

NOVELTY - The electronic apparatus comprises a graphene film (3) and an electrode (4) electrically connected with the graphene film. The graphene film has a portion (3A) whose density of states is higher than another portion in a connection portion with the electrode. The graphene film is processed into a nano ribbon structure. The edge of graphene film is formed into the mixed structure of a zigzag form and the shape of an armchair. The graphene film is laminated on multiple layers. USE - Electronic apparatus, particularly graphene transistor. ADVANTAGE - Reliable and highly efficient structure of electronic apparatus is ensured. Sufficient mobility and sharp reduction of contact resistance are ensured. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a manufacturing method for an electronic apparatus. DESCRIPTION OF DRAWING(S) - The drawings show a top view and a sectional view of a connection structure of an electronic apparatus. (Drawing includes non-English language text). Silicon substrate (1) Insulating film (2) Graphene film (3) High density portion (3A) Electrode (4)