• 专利标题:   Multi-station graphene fast growing device comprises fixing platform, vacuum pump, gas conveying pipeline, heating device, graphene growth processing cavity, sealing flange, vacuumizing port, air inlet, vacuum pump, and mobile device.
  • 专利号:   CN206591177-U
  • 发明人:   DUAN Y, HUANG D, LI H, LI Z, SHI H, WANG Z, WU J, YU J, ZHANG Y
  • 专利权人:   CHONGQING GRAPHENE TECH CO LTD
  • 国际专利分类:   C23C016/26, C23C016/44
  • 专利详细信息:   CN206591177-U 27 Oct 2017 C23C-016/26 201777 Pages: 12 Chinese
  • 申请详细信息:   CN206591177-U CN20306853 27 Mar 2017
  • 优先权号:   CN20306853

▎ 摘  要

NOVELTY - The utility model claims a quickly growing the multi-station graphene device graphene growth device fully uses, comprising a mounting fixing platform, a vacuum pump, a gas conveying pipeline, heating device, graphene growth process cavity; the graphene growth process chamber has a sealing flange, opening, air inlet, the vacuum communicates with the vacuum pump; the air inlet is connected with the gas conveying pipeline; the graphene growth process chamber at least has two, the graphene growth process cavity mounted on the fixed platform; the graphene growth process chamber with process cavity outer pipe, said heating device is set at the outer side of the process cavity outer pipe; the mounting fixing platform is provided with the heating device from one process cavity outer side mobile heating device mobile device to another process cavity outer side. graphene stretch fast by the multi-station device can reduce resource waste and improves the production efficiency.