• 专利标题:   Preparation of corrosion resistant and hydrophobic micro-nano component used in micro-electromechanical system, involves electroforming, electrochemical polishing, heat treatment, keeping temperature, and cooling.
  • 专利号:   CN114150350-A, CN114150350-B
  • 发明人:   LIANG X, WANG S, LIU Z, SUO W, WANG Y
  • 专利权人:   UNIV BEIJING TECHNOLOGY
  • 国际专利分类:   C21D001/74, C25D001/00, C25D015/00, C25D003/12, C25F003/16
  • 专利详细信息:   CN114150350-A 08 Mar 2022 C25D-001/00 202228 Chinese
  • 申请详细信息:   CN114150350-A CN11323519 09 Nov 2021
  • 优先权号:   CN11323519

▎ 摘  要

NOVELTY - Preparing corrosion-resistant and hydrophobic micro-nano component comprises e.g. (i) using SU-8 etching to prepare a micronano part glue model cavity, configuring electroforming liquid, electrodepositing the micro nano part adhesive model cavity with electroforming solution, until casting the micro nanofiber glue mold, (ii) configuring the polishing solution according to the proportion, and polishing the electrocasting micro-nanofiber component according to a polishing parameter, and (iii) placing the micro-Nano part sample after polishing in a tubular furnace with a preset temperature range of 150-300degrees Celsius, keeping the temperature for 2 hours, cooling with the furnace to obtain a corrosion-proof and hydropobic composite micro-anano component, where the electro-forming liquid comprises a graphene dispersion liquid and an amino sulfonic acid nickel salt solution. USE - The micro-nano component is used in micro-electromechanical system (MEMS). ADVANTAGE - The corrosion resistant and hydrophobic graphene-nickel micro-nano part has excellent corrosion resistance and light weight, and prevents corrosion of acid and alkali salt, and can be continuously used in severe environments e.g. high temperature, high pressure, corrosion and so on, and solves the problem of poor uniformity of the casting layer.