专利标题: Manufacture of graphene involves supplying process gas containing carbon source on substrate, and pre-processing substrate using oxidative gas plasma to form graphene layer on substrate.
专利号: KR2014005470-A, KR1381008-B1
发明人: CHUN S H, KIM Y S
专利权人: UNIV SEJONG IND ACAD COOP GROUP
国际专利分类: B01J019/12, C01B031/02, H01L021/033
专利详细信息: KR2014005470-A 15 Jan 2014 C01B-031/02 201417 Pages: 18
申请详细信息: KR2014005470-A KR072730 04 Jul 2012
优先权号: KR072730
▎ 摘 要
NOVELTY - Manufacture of graphene involves supplying process gas containing carbon source on substrate, and pre-processing the substrate using oxidative gas plasma to form graphene layer on substrate.
USE - Manufacture of graphene (claimed).
