• 专利标题:   Layered body useful in electronic element, such as transistor, comprises base portion comprising silicon carbide and having surface which is silicon surface, and carbon atom thin film arranged over surface and comprising carbon atoms.
  • 专利号:   WO2021005847-A1, JP2021530490-X, US2022231123-A1
  • 发明人:   MITSUHASHI F, TATENO Y, ADACHI M, YAMAMOTO Y
  • 专利权人:   SUMITOMO ELECTRIC IND LTD, SUMITOMO ELECTRIC IND LTD
  • 国际专利分类:   B32B018/00, B32B003/26, B32B007/025, B32B009/00, C01B032/05, C01B032/184, C01B032/194, C01B032/956, H01L021/336, H01L029/16, H01L029/78, H01L021/223, H01L029/06, H01L029/10, H01L029/165, H01L029/66
  • 专利详细信息:   WO2021005847-A1 14 Jan 2021 B32B-009/00 202108 Pages: 40 Japanese
  • 申请详细信息:   WO2021005847-A1 WOJP013537 26 Mar 2020
  • 优先权号:   JP125868

▎ 摘  要

NOVELTY - Layered body (11) comprises a base portion (12) comprising silicon carbide and having a first surface which is a silicon surface, and a carbon atom thin film (13) arranged over the first surface and comprising carbon atoms, where the carbon atom thin film comprises a first main surface contacting the first surface and a second main surface which is on the opposite side from the first main surface. The carbon atom thin film comprises at least any one among a graphene layer and a buffer layer which is a carbon atom layer containing carbon atoms bonded to the silicon atoms constituting the silicon surface. The second main surface comprises terraces which are parallel to the silicon surface of the silicon carbide constituting the base portion and connecting the terraces. The terrace width is 5-500 mu m inclusive. The step height is 10-500 nm inclusive. USE - The layered body is useful in an electronic element, such as a transistor. ADVANTAGE - The layered body has improved modulation characteristic, electrical property and high mobility. The method shortens preparation time and is easily produced and suitable for mass-productivity. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) an electronic element; and (2) a method for producing the layered body. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the layered body. Layered body (11) Base portion (12) Carbon atom thin film (13)