• 专利标题:   Metal-free complementary metal oxide on semiconductor integrated circuit for use in semiconductor chip fabrication field, has graphene layer including region of undoped graphene, where undoped graphene is connected with transistor channel.
  • 专利号:   US2012326129-A1, US8803131-B2
  • 发明人:   LIN Y, YAU J
  • 专利权人:   INT BUSINESS MACHINES CORP, INT BUSINESS MACHINES CORP
  • 国际专利分类:   H01L029/78
  • 专利详细信息:   US2012326129-A1 27 Dec 2012 H01L-029/78 201303 Pages: 14 English
  • 申请详细信息:   US2012326129-A1 US604254 05 Sep 2012
  • 优先权号:   US614724, US604254

▎ 摘  要

NOVELTY - The circuit has a graphene layer including a region of undoped graphene (401), where the undoped graphene is connected with a channel (903) of a transistor (900b) and a region of doped graphene (402) is connected with a contact (904) of the transistor. A dielectric layer is located on top of the graphene layer and underneath a gate (902) of the transistor. A top level interconnect is etched on top of the dielectric layer. A substrate is located underneath the graphene layer. A mask is applied to a portion of an etched graphene region. USE - Metal-free complementary metal oxide on semiconductor integrated circuit for use in semiconductor chip fabrication field. ADVANTAGE - The circuit allows carbon and oxide material to provide transparent and flexible circuits that can be easily stacked to produce multilayer circuits that are environment-friendly. The circuit eliminates limited thermal budget and tool cross-contamination. DETAILED DESCRIPTION - The dielectric layer and the substrate are made of oxide material. The doped graphene is made of polyethylemneimine or diazonium. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a transistor including graphene and carbon nanotubes. Undoped graphene (401) Doped graphene (402) Transistor (900b) Gate (902) Channel (903) Contact (904)