▎ 摘 要
NOVELTY - The utility model claims graphene surface plasma waveguide trace gas sensing device, comprising in turn overlapped bottom medium layer, middle layer and top graphene nano array layer, the graphene nano array layer is graphene array layer of nano structure. Because of low consumption of graphite alkene, good conductor characteristics that have signal and generate the spontaneous radiation device and a kind of the noise loss, using the nano granule array not only is easy to spread SPPs, and absorbing effect for the trace amount gas molecule has the notable improvement, trace gas detection not only can aim at the detection of single gas, also can aim at special environment of a kind of multi-toxic gas measurement. The device providing one of one of high sensitivity and measuring range wide and sensor part, and with the existing preparation technology, is easy to realize.