• 专利标题:   Soil temperature and humidity sensor, has humidity sensitive unit comprising reference inter digital electrode and humidity sensitive electrode that is coated with humidity sensitive film, and temperature sensitive unit constructed on substrate.
  • 专利号:   CN115901879-A
  • 发明人:   ZHAO J, LI L, GE Y
  • 专利权人:   SHANGHAI INST MICROSYSTEM INFORMATION
  • 国际专利分类:   G01D021/02, G01N027/22
  • 专利详细信息:   CN115901879-A 04 Apr 2023 G01N-027/22 202335 Chinese
  • 申请详细信息:   CN115901879-A CN11654021 22 Dec 2022
  • 优先权号:   CN11654021

▎ 摘  要

NOVELTY - The sensor has a platinum resistor pin (1), a humidity sensitive unit (2), a temperature sensitive unit and a printed circuit board connected with the humidity sensitive units. The humidity sensitivity unit comprises a reference inter digital electrode and a humidity sensitive electrode (4). The humidity sensitive electrode is coated with a humidity sensitivity film. The temperature sensitivity unit is a serpentine platinum resistor (3) structure constructed on a substrate. The substrate is a metal-plated platinum resistor. The substrate of the reference inter digital electrode and humidity sensitive electrode is one of glass, silicon chip, flexible substrate. The humidity sensing material of the humidity sensitive film is at least polyimide derivative graphene, oximeter, graphene oxide, molybdenum disulfide. The covering layer is a plastic cover formed by multi-layer micro-porous structure, the material is ABS or PVC. USE - Soil temperature and humidity sensor. ADVANTAGE - The metal sputtering on the glass to form an electrode can effectively reduce the area of the chip, and the chip function is diversified. The micro-capacitance detection circuit can accurately obtain the capacitance change value obtained by the humidity sensitive material, but not affected by parasitic capacitance. The porous material is used to package, avoiding the soil/sand directly interacting with the receptor material on the chip any type, with good application prospect. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a preparation method of soil temperature and humidity sensor. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the soil temperature and humidity sensor. 1Platinum resistor pin 2Humidity sensitive unit 3Serpentine platinum resistor 4Humidity sensitive film