• 专利标题:   Photodetector used in semiconductor device, has two waveguide segments which are in contact on one side, and gate electrode which comprises silicon or consists of silicon on side facing active element.
  • 专利号:   DE202020101285-U1, WO2021180464-A1, CA3174453-A1, CN115280228-A, KR2022151615-A, IN202227047727-A, EP4118486-A1, JP2023517900-W
  • 发明人:   SCHALL D, SHAL D
  • 专利权人:   GES ANGEWANDTE MIKRO OPTOELEKTRONIK MI, AMO GMBH, GES ANGEWANDTE MIKRO OPTOELEKTRONIK MI
  • 国际专利分类:   G02F001/015, H01L031/0232, H01L031/113, G02F001/13, G02F001/01, H01L031/028, H01L031/036, H01L031/103, H01L031/112, B29C065/14, H01L027/30, H01L051/42, H05B006/70, G02F001/025, H01L029/201, H01L029/22, H01L031/10
  • 专利详细信息:   DE202020101285-U1 29 Jul 2021 H01L-031/113 202166 Pages: 33 German
  • 申请详细信息:   DE202020101285-U1 DE20101285 09 Mar 2020
  • 优先权号:   DE20101285, KR729649, CA3174453, CN80019852

▎ 摘  要

NOVELTY - The photodetector (3) has an active element (13) which overlaps a longitudinal section (12) of a waveguide and comprises a material or consists of material that absorbs electromagnetic radiation of wavelength and generates an electrical photo signal as a result of the absorption. The two waveguide segments (12a, 12b) are in contact on one side. A gate electrode (15a, 15b) comprises silicon or consists of silicon on the side facing the active element. USE - Photodetector used in semiconductor device (claimed). ADVANTAGE - The optimal overlap is achieved between the absorbing material and the active area of the photodetector. The optical mode interacts efficiently with an active optical material. The dumping of the graphene film of the detector takes place through a transfer method. The large number of semiconductor devices is produced in a simple and fast manner. The circuit is protected from environmental influences such as water. The losses in the waveguide are reduced. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) a modulator; and (2) a semiconductor device. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of the semiconductor device. Photodetector (3) Longitudinal section (12) Waveguide segments (12a, 12b) Active element (13) Gate electrode (15a, 15b)