• 专利标题:   Infrared detector for use in integral part of optical circuits and components for sensing radiation, has cavity in amorphous silicon or vanadium oxide layer to create gap between bundled graphene layer or carbon nanotube fabric.
  • 专利号:   US9945720-B1
  • 发明人:   EGERTON E J, SOOD A K
  • 专利权人:   MAGNOLIA OPTICAL TECHNOLOGIES INC
  • 国际专利分类:   G01J001/44, G01J005/20, H01L031/028, H01L031/09
  • 专利详细信息:   US9945720-B1 17 Apr 2018 G01J-005/20 201827 Pages: 16 English
  • 申请详细信息:   US9945720-B1 US757708 22 Dec 2015
  • 优先权号:   US095747P, US757708

▎ 摘  要

NOVELTY - The detector has a cavity in an amorphous silicon or vanadium oxide layer to create a gap between a bundled graphene layer or a carbon nanotube fabric and a substrate such that the bundled graphene layer or carbon nanotube fabric is suspended above the substrate. The bundled graphene layer or carbon nanotube fabric is tuned to be sensitive to infrared (IR) radiation in a micron band of 1 to 12 microns by modulation of a concentration of nanoparticles, where the exposure of IR radiation induces a change in impedance between two conductive terminals. USE - IR detector for use in an integral part of optical circuits and components for sensing of electromagnetic radiation. Uses include but are not limited to emitters, modulators, repeaters, waveguides or fibers, reflectors, resonators, detectors and IR Focal plane arrays. ADVANTAGE - The detector has bolometers operated by absorbing radiation which raises the temperature of the material and alters the resistance of the material. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of an IR detector. Readout circuit (101) Insulating material (102) Reflection layer (103) Sacrificial layer (104)