• 专利标题:   Method for forming epitaxial graphene layer on electronic component i.e. semiconductor memory, involves removing native oxide film formed on silicon carbide substrate to form epitaxial graphene layer on silicon carbide substrate.
  • 专利号:   KR2010130863-A
  • 发明人:   JIN CHO B, HO SEO J, JIN GANG B
  • 专利权人:   KOREA ADV INST SCI TECHNOLOGY
  • 国际专利分类:   H01L021/20
  • 专利详细信息:   KR2010130863-A 14 Dec 2010 201109 Pages: 8
  • 申请详细信息:   KR2010130863-A KR049591 04 Jun 2009
  • 优先权号:   KR049591

▎ 摘  要

NOVELTY - The method involves injecting fluorine sulfur gas inside a furnace with a silicon carbide substrate for 1-30 seconds to form a native oxide film on the silicon carbide substrate. The silicon carbide substrate is preheated about 200-800 degree Celsius. The furnace is heated to about 1400-1600 degree Celsius. The native oxide film formed on the silicon carbide substrate is removed to form an epitaxial graphene layer on the silicon carbide substrate. USE - Method for forming an epitaxial graphene layer on an electronic component i.e. semiconductor memory. ADVANTAGE - The method enables uniformly forming the high-quality graphene layer on the silicon carbide substrate such that the electronic component consumes less power. DESCRIPTION OF DRAWING(S) - The drawing shows a flowchart illustrating a graphene layer formation method.'(Drawing includes non-English language text)'