▎ 摘　　要

NOVELTY - The oxygen infiltration detector has sensor with measuring field and electrode and electrical connection to the external measuring system. The sensor has sensor base made of ceramic plate having titanium layer. The metal electrodes are provided on the side edges of the sensor base, and each is covered with at least one metallurgical graphene layer. The titanium layer, not covered with the metallurgical graphene layer, constitutes the measurement field of the sensor fixed between a pair of conductive rods such that the side edges of the sensor along which the metal electrodes extend are inserted into slots cut into the ends of the conductive rods. The metal electrodes, covered with graphene layer, are pressed against the inner surfaces of the slots in the conductive rods by the screws passing through the holes at the ends of the conductive rods, from the sensor base side. USE - Oxygen infiltration detector for use in vacuum thermoprocess chambers.