• 专利标题:   Preparing vertical graphene composite based on nanodiamond-type carbon film, comprises magnetron sputtering metal catalyst uniformly on substrate surface, preparing nano-diamond-type carbon film and placing substrate for depositing nano-diamond-type carbon film in hydrogen environment.
  • 专利号:   CN114941128-A
  • 发明人:   YOU Y, GUO X
  • 专利权人:   UNIV NORTH CHINA
  • 国际专利分类:   C23C014/02, C23C014/06, C23C014/35
  • 专利详细信息:   CN114941128-A 26 Aug 2022 C23C-014/35 202283 Chinese
  • 申请详细信息:   CN114941128-A CN10621350 02 Jun 2022
  • 优先权号:   CN10621350

▎ 摘  要

NOVELTY - Preparing vertical graphene composite based on nanodiamond-type carbon film, comprises (i) magnetron sputtering metal catalyst uniformly on the substrate surface by magnetron sputtering; (ii) preparing nano-diamond-type carbon film at 600-900 °C, where the substrate prepared in step a sputtered with the metal catalyst film is placed in a carbon-containing gas environment to prepare a nano-diamond-type carbon film; (iii) placing substrate for depositing the nano-diamond-type carbon film in a hydrogen environment, heating, maintaining for 10-60 minutes, so that the nano-diamond-type carbon film is maintained for 10-60 minutes and performing graphitization. The substrate is silicon or germanium. USE - The method is useful for preparing vertical graphene composite based on nano diamond-type carbon film. ADVANTAGE - The method enables to prepare vertical graphene composite based on nano-diamond film that solves the problem that the bottom of the existing vertical graphene layer contains a large amount of un-graphitized amorphous carbon film, which greatly affects the vertical graphene structure in optical, performance of the electrical device and so on. The method is simple, easy to be obtain and easy to maintain, the requirement of the operation environment is low, the popularization range is large. In the preparation process, it is good for reducing generation of amorphously carbon before growth, observing by electron microscope, combining the scanning electron microscope photo of the vertical graphitization degree.