• 专利标题:   Wirelessly readable sensor for detection of photons falling on surface and/or foreign matter accumulating on surface, has surface layer located above and on graphene layer and reacts electrically to photons or deposited foreign substances.
  • 专利号:   WO2021028158-A1, EP4014261-A1
  • 发明人:   WANG Z, HEMMETTER A, UZLU H B, NEUMAIER D
  • 专利权人:   AMO GMBH, AMO GMBH
  • 国际专利分类:   A61B005/00, G01N027/414, G06K019/07, H01L031/02, H01L031/028, H01L031/112
  • 专利详细信息:   WO2021028158-A1 18 Feb 2021 202120 Pages: 25 German
  • 申请详细信息:   WO2021028158-A1 WOEP070461 20 Jul 2020
  • 优先权号:   DE10122007

▎ 摘  要

NOVELTY - The sensor has a graphene FET built up in layers with a metallic gate electrode that has a gate connection (24), a dielectric barrier (26) located above the graphene FET and a graphene layer (28) located above the dielectric barrier and is connected to a source contact (30) and a drain contact (32). The source contact is connected to the gate terminal. A surface layer (20) is located above and on the graphene layer and reacts electrically to photons and/or deposited foreign substances. USE - Wirelessly readable sensor for detection of photons falling on surface and/or foreign matter accumulating on surface. ADVANTAGE - A wireless sensor that works exclusively through radio link and does not require its own power supply and can be made small is provided. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic sectional view of the wirelessly readable sensor. Surface layer (20) Gate connection (24) Dielectric barrier (26) Graphene layer (28) Source contact (30) Drain contact (32)