▎ 摘 要
NOVELTY - The graphene thinning device has a workbench (42) that is provided with a vacuum chamber (41) for placing the graphene. A thinning path unit (1) is connected with a stimulation light path unit (2) which is provided to emit laser beams focusing on the graphene surface above the worktable to realize thinning. An optical detection unit (3) is located under the workbench, and is provided for analyzing graphene Raman spectrum signal after the filter processing. A reduction light path unit is connected with the optical detection unit which is coupled with a computer. USE - Optical detection type graphene thinning device. ADVANTAGE - The graphene thinning device adjusts the laser power and the graphene thinning time according to the actual measured number of graphene layers in the processed area, and precisely controls the number of thinning layers of graphene. The graphene film having uniform layer number is obtained. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the graphene thinning device. Thinning path unit (1) Stimulation light path unit (2) Optical detection unit (3) Vacuum chamber (41) Workbench (42)