• 专利标题:   Graphene or molybdenum disulfide hetero-junction based resonant electric optical modulator, has waveguide whose side is formed with resonant cavity, where two sides of resonant cavity are matched with electrodes.
  • 专利号:   CN105372853-A
  • 发明人:   LIU Y, LU R, SHOU X, TIAN C, YE S, XIA R
  • 专利权人:   UNIV CHINA ELECTRONIC SCI TECHNOLOGY
  • 国际专利分类:   G02F001/035
  • 专利详细信息:   CN105372853-A 02 Mar 2016 G02F-001/035 201620 Pages: 8 English
  • 申请详细信息:   CN105372853-A CN10934808 15 Dec 2015
  • 优先权号:   CN10934808

▎ 摘  要

NOVELTY - The modulator has a vertical light waveguide whose inner side is formed with a micro-ring waveguide resonant cavity (3). A coupling gap is formed between the vertical light waveguide unit and the resonant cavity. A graphene covering layer is matched with the resonant cavity. A surface of the graphene covering layer comprises with two graphene parts (41, 42), a molybdenum disulfide part (43) and two electrodes (44, 45). The molybdenum disulfide part is fixed between the graphene parts. Two sides of the resonant cavity are matched with the electrodes that are fixed on a base layer (1). USE - Graphene or molybdenum disulfide hetero-junction based resonant electric optical modulator. ADVANTAGE - The modulator has low optical loss, low thermal coefficient, low insertion loss, large environmental temperature tolerance, better modulation depth and high extinction ratio. DETAILED DESCRIPTION - The vertical light waveguide and the resonant cavity are made of silicon nitride material. The electrodes are made of gold, silver, copper, platinum, titanium, nickel, cobalt and palladium. The base layer is made of silicon dioxide material. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a graphene or molybdenum disulfide hetero-junction based resonant electric optical modulator. Base layer (1) Micro-ring waveguide resonant cavity (3) Graphene parts (41, 42) Molybdenum disulfide part (43) Electrodes (44, 45)