▎ 摘 要
NOVELTY - The modulator has a vertical light waveguide whose inner side is formed with a micro-ring waveguide resonant cavity (3). A coupling gap is formed between the vertical light waveguide unit and the resonant cavity. A graphene covering layer is matched with the resonant cavity. A surface of the graphene covering layer comprises with two graphene parts (41, 42), a molybdenum disulfide part (43) and two electrodes (44, 45). The molybdenum disulfide part is fixed between the graphene parts. Two sides of the resonant cavity are matched with the electrodes that are fixed on a base layer (1). USE - Graphene or molybdenum disulfide hetero-junction based resonant electric optical modulator. ADVANTAGE - The modulator has low optical loss, low thermal coefficient, low insertion loss, large environmental temperature tolerance, better modulation depth and high extinction ratio. DETAILED DESCRIPTION - The vertical light waveguide and the resonant cavity are made of silicon nitride material. The electrodes are made of gold, silver, copper, platinum, titanium, nickel, cobalt and palladium. The base layer is made of silicon dioxide material. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a graphene or molybdenum disulfide hetero-junction based resonant electric optical modulator. Base layer (1) Micro-ring waveguide resonant cavity (3) Graphene parts (41, 42) Molybdenum disulfide part (43) Electrodes (44, 45)