• 专利标题:   Method for preparing graphene/silver hexadecane-star array Raman enhanced substrate, involves transferring graphene to surface of silver hexadecane-star array and annealing in tube furnace to obtain graphene/silver hexadecane-star array.
  • 专利号:   CN111982883-A
  • 发明人:   ZHAO Y, LI X, CHU B, CAO K, JIAO M
  • 专利权人:   UNIV LUDONG
  • 国际专利分类:   B82Y015/00, B82Y040/00, G01N021/65
  • 专利详细信息:   CN111982883-A 24 Nov 2020 G01N-021/65 202003 Pages: 12 Chinese
  • 申请详细信息:   CN111982883-A CN10908968 02 Sep 2020
  • 优先权号:   CN10908968

▎ 摘  要

NOVELTY - The method involves drawing pattern of sixteen-pointed star array with KLayout software, where a discontinuous point column is set at a tip of sixteen-pointed star to compensate for a tip distortion caused by electron scattering. A silicon is used as substrate and polymethyl methacrylate (PMMA) as photoresist (2), according to the drawn hexadecane-star array pattern. A micro-nano lithography is performed on the photoresist by electron beam exposure, then develop and fix to obtain a sixteen-pointed star hole array photoresist. Metal chromium and silver films are deposited and stripped on the hexadecane-star hole array photoresist to obtain a silver hexadecimal star array. A graphene (4) is transferred to the surface of the silver hexadecane-star array and annealed in a tube furnace to make the graphene closely adhere to the surface of the silver hexadecane-star array to obtain graphene/silver hexadecane-star array. USE - Method for preparing graphene/silver hexadecane-star array Raman enhanced substrate. ADVANTAGE - The uniform and ordered nanostructure is obtained on the substrate, and the shape and size of the sixteen-pointed star and the distribution of the needle tip are uniform, and the repeatability is high. The silver sixteen-pointed star array has periodic arrangement and uniformly distributed needle points, which enhances the electromagnetic enhancement effect. The graphene covers the surface of the silver hexadecane-star star array, and protects the hexadecane-star array layer from oxidation and corrosion. The graphene promotes molecular adsorption, inhibits fluorescence, avoids the change of Raman characteristic peak caused by direct contact between molecules and metal, and the effect of chemical enhancement. The graphene and the silver hexadecane-star array are closely attached to give full play to the electromagnetic enhancement of the silver hexadecane-star array and the chemical enhancement of graphene. The obtained surface enhanced Raman scattering (SERS) signal has high sensitivity and good uniformity. DESCRIPTION OF DRAWING(S) - The drawing shows a flow chart of the method for preparing graphene/silver hexadecane-star array Raman reinforced substrate. (Drawing includes non-English language text) Silicon chip (1) Photoresist (2) Metal (3) Graphene (4)