• 专利标题:   Fabricating graphene tunnel field effect transistor involves growing first layer on silicon carbide, where first layer comprises graphene, growing second layer over first layer, where second layer comprises graphene, forming source polarity gate metal over source region, drain polarity gate metal.
  • 专利号:   IN202111051113-A
  • 发明人:   SHARMA R, PANDEY R, MADAN J, SHARMA P
  • 专利权人:   CHITKARA INNOVATION INCUBATOR FOUND
  • 国际专利分类:   B82Y010/00, H01L029/16, H01L029/66, H01L029/739, H01L029/778
  • 专利详细信息:   IN202111051113-A 12 May 2023 H01L-029/66 202344 English
  • 申请详细信息:   IN202111051113-A IN11051113 08 Nov 2021
  • 优先权号:   IN11051113

▎ 摘  要

NOVELTY - Fabricating graphene tunnel field effect transistor involves growing a first layer on a silicon carbide, where the first layer comprises graphene, growing a second layer over the first layer, where the second layer comprises graphene, forming a source polarity gate metal over the source region, a drain polarity gate metal over the drain region, and a control gate metal electrode over the channel region, p-source region, n-channel, and n+ -drain region in the second graphene layer are formed by using a source polarity gate metal, a control gate metal electrode, and a drain polarity gate metal, respectively, and insulating the source polarity gate metal from the second layer using a high-k dielectric, where a control gate metal electrode, and a drain polarity gate metal from the second layer using a carbon allotrope (Diamond-like Carbon). USE - Method for fabricating graphene tunnel field effect transistor. ADVANTAGE - The graphene tunnel field effect transistor has cost-effective, more efficient, and less leakage current. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a graphene tunnel field effect transistor. 102Substrate 104-1First layer 104-2Second layer 106Source meta 110Polarity drain metal