• 专利标题:   Roll-to-roll large area graphene synthesis device useful for producing large area graphene and reducing graphene oxide fabric, comprises e.g. supply roll device provided inside reaction chamber, and gas supply unit to supply gas.
  • 专利号:   KR2149030-B1
  • 发明人:   JIN Y, JANG S, JOUNG H, JUNG H S, KA D
  • 专利权人:   AGENCY DEFENSE DEV
  • 国际专利分类:   B01J019/00, B01J019/08, C01B032/184, C01B032/198, D06M010/02
  • 专利详细信息:   KR2149030-B1 27 Aug 2020 C01B-032/184 202074 Pages: 26
  • 申请详细信息:   KR2149030-B1 KR047262 20 Apr 2020
  • 优先权号:   KR047262

▎ 摘  要

NOVELTY - Roll-to-roll large area graphene synthesis device comprises a reaction chamber (110) formed to be sealed with the outside, a supply roll device provided inside the reaction chamber and unwinding the reaction substrate, a gas supply unit (130) for supplying a gas required for graphene synthesis into the reaction chamber, a plasma supply unit (140) for supplying plasma into the reaction chamber, a heating unit (150) for synthesizing graphene in the reaction chamber, and a recovery roll device (160) for recovering the large area graphene synthesized from the heating unit. The roll-to-roll large-area graphene synthesis device is a plasma enhanced chemical vapor deposition based device. The plasma supply unit is in a circle, a helical type, a plate type, and an annular shape in the quartz tube inner and/or outer to discharge the plasma by applying 10-30 MHz AC power. USE - The device is useful for producing large area graphene and reducing graphene oxide fabric (all claimed). ADVANTAGE - The device reduces manufacturing time and production cost, provides protection against toxic chemicals and flames, can be automatically performed by an internal control program according to set conditions, and performed easily and quickly. DETAILED DESCRIPTION - Roll-to-roll large area graphene synthesis device comprises a reaction chamber (110) formed to be sealed with the outside, a supply roll device provided inside the reaction chamber and unwinding the reaction substrate, a gas supply unit (130) for supplying a gas required for graphene synthesis into the reaction chamber, a plasma supply unit (140) for supplying plasma into the reaction chamber, a heating unit (150) for synthesizing graphene in the reaction chamber, and a recovery roll device (160) for recovering the large area graphene synthesized from the heating unit. The roll-to-roll large-area graphene synthesis device is a plasma enhanced chemical vapor deposition based device. The plasma supply unit is in a circle, a helical type, a plate type, and an annular shape in the quartz tube inner and/or outer to discharge the plasma by applying 10-30 MHz AC power. The reaction substrate is a non-catalytic fabric substrate. The non-catalytic fabric substrate is made of carbon fiber, activated carbon fiber, glass fiber, kevlar, and/or inorganic fiber. INDEPENDENT CLAIMS are also included for: (1) producing large area graphene using the device, comprising (a) mounting a reaction substrate to the supply roll device, (b) sealing the reaction chamber and forming a vacuum to separate the internal environment and the external environment, (c) continuously supplying the reaction substrate into the reaction chamber using a supply roll device, (d) supplying a gaseous precursor into the reaction chamber through a gas supply unit, and supplying plasma and thermal energy to deposit graphene on the reaction substrate to synthesize graphene, and (e) recovering large-area graphene prepared from the reaction chamber through a continuous process using a recovery roll device; and (2) reducing graphene oxide fabric, comprising (i) f mounting the graphene oxide-coated fabric to the supply roll device, (ii) sealing the reaction chamber and forming a vacuum, (iii) continuously supplying the graphene oxide-coated fabric into the reaction chamber using a supply roll device, (iv) supplying plasma and thermal energy to the reaction chamber to reduce the graphene oxide-coated fabric, and (v) recovering the reduced graphene fabric from the reaction chamber through a continuous process using a recovery roll device. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic representation of the roll-to-roll large area graphene synthesis device. Reaction chamber (110) Gas supply unit (130) Plasma supply unit (140) Heating unit (150) Recovery roll device (160)