▎ 摘　　要

NOVELTY - An optically tunable terahertz modulator with low power consumption and low insertion loss comprises a quartz substrate, a silicon film, a silicon nanoneedle array structure and a graphene film which are sequentially arranged, the graphene film is multi layer. The thickness of the quartz substrate is 300-500pm. The silicon film is an N-type silicon film with a thickness of 80-200pm, and the resistivity is 1,000-5,000 Q-cm. The diameter of the nanoneedle of the silicon nanoneedle array structure is 100-300nm, and the length is 3-8m. USE - Optically tunable terahertz modulator for communication, security inspection, nondestructive detection, and medical imaging. ADVANTAGE - The optically tunable terahertz modulator has the benefit of low energy, strong penetrating power and rich spectral information. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the optically tunable terahertz modulator.