• 专利标题:   Preparing graphene using amorphous carbon at low temperature comprises e.g. taking magnetic metal of nickel, iron or cobalt in vacuum cavity, setting electromagnet and forming plasma atmosphere restricted by closed magnetic field.
  • 专利号:   CN111826610-A
  • 发明人:   WU Y, YU S, LIU Y, GAO J, HEI H, ZHOU B, MA Y
  • 专利权人:   UNIV TAIYUAN TECHNOLOGY
  • 国际专利分类:   C23C014/06, C23C014/35, C23C014/58, C23C016/26, C23C016/50, C23C016/56
  • 专利详细信息:   CN111826610-A 27 Oct 2020 C23C-014/06 202091 Pages: 8 Chinese
  • 申请详细信息:   CN111826610-A CN10610464 30 Jun 2020
  • 优先权号:   CN10610464

▎ 摘  要

NOVELTY - Preparing graphene using amorphous carbon at low temperature comprises taking one magnetic metal of nickel, iron and cobalt in the vacuum cavity as the base, then setting the electromagnet at the base, when applying bias voltage, then forming plasma atmosphere restricted by closed magnetic field at the base, placing base on the metal substrate, back-sputtering the metal substrate on the substrate, then passing through the back-sputtering base station, sputtering a carbon target or ionizing carbon-containing gas, depositing magnetic metal/amorphous carbon multilayer film on the substrate and then controlling the annealing temperature and annealing time using heat treatment furnace to obtain graphite with different layers and different crystallinities. The ionized carbon-containing gas is carbon containing gas which is ionized into a group containing a carbon atom. USE - The method is useful for preparing graphene using amorphous carbon at low temperature. ADVANTAGE - The method: produces graphene layer which is controllable, and has high quality, excellent uniformity, simple preparation process and low cost.