• 专利标题:   Method for preparing high-voltage graphene material Nano-electro-mechanical resonator in wireless electronic communication device, involves calculating widths of source and drain metal electrode layer to calculate width of motor.
  • 专利号:   CN103414449-A, CN103414449-B
  • 发明人:   ZHANG Y, LU X, XU Y, SUN Y, LI O
  • 专利权人:   UNIV CHINA ELECTRONIC SCI TECHNOLOGY
  • 国际专利分类:   H03H003/02, H03H009/15
  • 专利详细信息:   CN103414449-A 27 Nov 2013 H03H-009/15 201407 Chinese
  • 申请详细信息:   CN103414449-A CN10388845 30 Aug 2013
  • 优先权号:   CN10388845

▎ 摘  要

NOVELTY - The method involves embedding a T-shaped gate metal electrode (2) in a rubber layer (3). A high-resistance silicon substrate (1) is formed with a silicon dioxide medium layer (4) by performing plasma enhanced chemical vapor deposition operation. Graphite moving process is performed. A source metal electrode layer (6) is formed as a drain metal electrode layer (7). Widths of the source and drain metal electrode layers are calculated to calculate width of a high-voltage graphene material motor. Metal titanium and gold-molybdenum alloy is coated on the high-resistance silicon substrate. USE - Method for preparing a high-voltage graphene material Nano-electro-mechanical resonator in a wireless electronic communication device. ADVANTAGE - The method enables realizing high-voltage graphene material Nano-electro-mechanical resonator preparing process in a smooth manner, preventing a local back-gate structure from being damaged, avoiding graphite alkene surface pollution during preparation operation in an effective manner, reducing high-frequency resonator signal parasitic capacitance rate, increasing graphene resonant frequency and fixing a Nano-electro-mechanical resonator, a fixed support beam and the local back-gate structure together so as to generate a high-frequency mechanical vibration signal and improve graphene channel quality, thus realizing gate lengthening process. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a high-voltage graphene material Nano-electro-mechanical resonator. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of a high-voltage graphene material Nano-electro-mechanical resonator. High-resistance silicon substrate (1) T-shaped gate metal electrode (2) Rubber layer (3) Silicon dioxide medium layer (4) Source metal electrode layer (6) Drain metal electrode layer (7)