• 专利标题:   Method for forming graphene membrane component for microphone, involves performing energy of adhesion between adhesive layer and graphene membrane which is greater than energy of adhesion between bulk region and graphene membrane.
  • 专利号:   DE102017100894-A1, US2018201511-A1, CN108511601-A, US10150674-B2, US2019077671-A1, US10421665-B2, DE102017100894-B4
  • 发明人:   RUHL G, KOENIG M, RUHR G
  • 专利权人:   INFINEON TECHNOLOGIES AG, INFINEON TECHNOLOGIES AG
  • 国际专利分类:   B81B003/00, B81B007/02, B81C001/00, H04R001/00, C01B032/194, H01L043/06, H01L043/10, H01L043/14, G01R033/07, H04R019/01
  • 专利详细信息:   DE102017100894-A1 19 Jul 2018 B81C-001/00 201849 Pages: 21 German
  • 申请详细信息:   DE102017100894-A1 DE10100894 18 Jan 2017
  • 优先权号:   DE10100894

▎ 摘  要

NOVELTY - The method involves arranging a graphene membrane across a cut-out with an opening at the surface of supportive substrate, and is arranged so that a first portion of graphene membrane is arranged on the surface of supportive substrate and a second portion of graphene membrane is arranged over opening of cut-out section. The energy of adhesion between adhesive layer and graphene membrane is greater than energy of adhesion between bulk region and graphene membrane. The second portion of graphene membrane is tensioned to convert second portion of graphene membrane to a tensioned condition. The second portion of graphene membrane is permanently in tensioned condition in an operating temperature range of graphene membrane component. The tensioning is achieved through inherent adhesion through attraction of a third portion of graphene membrane to a portion of a wall of cut-out, and the portion of the wall of cut-out is formed by adhesive layer. USE - Method for forming graphene membrane component for microphone or Hall-effect sensor (claimed). ADVANTAGE - The complicated pre-tensioning of the graphene membrane before arrangement is eliminated, by virtue of the arrangement no of the graphene membrane in the relaxed condition of the graphene membrane on the surface of the supportive substrate. The first portion of the graphene membrane is arranged in an efficient and inexpensive manner on the surface of the supportive substrate. The expense involved in forming the graphene membrane component is reduced. The resultant graphene membrane component can have improved mechanical, electrical and/or electromechanical properties, by virtue of the permanent tension in the second portion of the graphene membrane. DESCRIPTION OF DRAWING(S) - The drawing shows a flowchart illustrating the process for the formation of graphene membrane component. (Drawing includes non-English language text) Method for forming graphene membrane component (100) Step for arranging graphene membrane in relaxed condition of graphene membrane on the surface of the supportive substrate (110) Step for tensioning of the second portion of the graphene membrane (120)