▎ 摘　　要

NOVELTY - Preparing rotary silicon-phosphorus alloy target comprises (i) placing silicon powder and red phosphorus powder in a formal ball mill to mix, and sieving with sieve size of 100-120 mesh; (ii) adding the sieved mixed powder into the ethanol solution with a volume multiple of 0.5-1, adding 1-2% antioxidant, 4-8% modified graphene and 2-5% dispersant, ultrasonically stirring and dispersing, performing decompression drying treatment, and fully mixing and spraying the treated substrate through supersonic plasma spraying equipment, using argon and hydrogen as primary and secondary plasma gases respectively to obtain semi-finished silicon-phosphorus alloy targets; and (iii) ultrasonically cleaning of the obtained semi-finished target material, and mechanically processing. The dispersant is n-butylamine. The polyhydric alcohol is ethylene glycol, pentaerythritol and/or sorbitol. USE - The alloy target is useful in field of solar cell and semiconductor (claimed). ADVANTAGE - The alloy target has alloy purity of more than 99.9%, uniform structure and high density and excellent physical properties. The method has high safety factor and significantly improves the conductive performance of the prepared metal target material. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for rotary silicon-phosphorus alloy target prepared by the above method.