▎ 摘　　要

NOVELTY - The shifter has a flat optical waveguide (1-2) formed on a substrate (1-1). A graphic heating layer (1-3) is located on a middle part of the flat optical waveguide. A ridge waveguide(1-5) is formed on a middle part of the flat optical waveguide (1-2) and the patterned heating layer. Two graphical electrodes (1-4) are respectively formed on two sides of graphic heating layer. A cladding (1-6) is formed on the ridge waveguide. USE - Intermediate infrared phase shifter for integrated optical phased array radar on chip used in field of laser radar. Can also be used in internet of things, cloud calculation of things and big data. ADVANTAGE - The waveguide and the cladding material in the middle infrared are provided with transparent window, so that the device can work in middle infrared. The device uses graphene as heating layer, the light field distribution has no influence. The design of the device isolates the electrode from the waveguide, so as to reduce the influence of the electrode and so on to the optical field distribution in waveguide. The application of cladding can make the large photoelectric interconnection structure wiring convenient. The refractive index of the modulation waveguide changes the output phase of the optical signal passing through the phase shifter, it solves the problem that the traditional silicon-on-insulator device cannot work in the mid infrared loss. DESCRIPTION OF DRAWING(S) - The drawing shows a cross sectional view of an intermediate infrared phase shifter. 1-1Substrate 1-2Flat optical waveguide 1-3Patterned heating layer 1-4Graphical electrodes 1-5Ridge waveguide 1-6Cladding 1-7Electrode leading-out structure 1-8External electrode control circuit