• 专利标题:   Near infrared wide band optical switch based on graphene absorption enhancement comprises modulation layer covered on substrate and is is provided with dielectric layer and metal nano-cylindrical array through photo-etching-coating.
  • 专利号:   CN111983827-A
  • 发明人:   WANG Q, YUAN Z, CAO B, XIONG X, HE G, ZHOU H, LUO A, CHEN W, XU L
  • 专利权人:   UNIV SOOCHOW
  • 国际专利分类:   G02F001/01, G02F001/09
  • 专利详细信息:   CN111983827-A 24 Nov 2020 G02F-001/09 202000 Pages: 18 Chinese
  • 申请详细信息:   CN111983827-A CN10852605 21 Aug 2020
  • 优先权号:   CN10852605

▎ 摘  要

NOVELTY - Near infrared wide band optical switch based on graphene absorption enhancement comprises a substrate, and a modulation layer covered on the substrate. The modulation layer is provided with a dielectric layer and a metal nano-cylindrical array through photo-etching-coating. The metal nano-cylindrical array is used as the first electrode. The modulation layer is provided with second electrode through coating. The modulation layer is a graphene layer. One layer of graphene layer is directly grown or transferred to the substrate. The graphene layer is applied with a direct current bias voltage in the vertical direction. The material of the dielectric layer is photoresist, which is spin-coated on the upper part of the modulation layer by spin coating machine, and formis a layer of uniform photoresist film and dielectric layer by the secondary double-beam holographic lithography process. The material of the metal nanocylinder array metal aluminum. USE - Used as near infrared wide band optical switch based on graphene absorption enhancement. ADVANTAGE - The switch: solves the problems of low modulation depth and complicated preparation; realizes kind of independent of incident polarization; and has relatively simple structure and preparation, excellent modulation depth and modulation bandwidth. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of the near infrared wide band optical switch based on graphene absorption enhancement.