• 专利标题:   Pointed cone array field emission triode structure has pointed cone that is set with metal on cathode substrate on the metal pointed tip and graphene node in existing gap.
  • 专利号:   CN105931931-A
  • 发明人:   DU X, LEI W, WANG Q, ZHANG X, DI Y
  • 专利权人:   UNIV SOUTHEAST
  • 国际专利分类:   H01J001/304, H01J009/02
  • 专利详细信息:   CN105931931-A 07 Sep 2016 H01J-001/304 201676 Pages: 8 Chinese
  • 申请详细信息:   CN105931931-A CN10312913 12 May 2016
  • 优先权号:   CN10312913

▎ 摘  要

NOVELTY - NOVELTY B The triode structure has a cavity array that is formed through the thickness of an oxidation layer (2). One set of metal is pointed at every cavity of oxidation layer to form all metal cone (6) as same metal cone array. The oxidation layer is formed on the substrate (1) of cathode. The graphene layer is formed as grid electrode on the big end face of the oxidation layer. The pointed cone is set with metal on cathode substrate on the metal pointed tip and graphene node in the existing gap. USE - Pointed cone array field emission triode structure. ADVANTAGE - ADVANTAGE B The palisade short path risk of the structure is reduced. The need of electric voltage is effectively reduced. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a manufacturing method of pointed cone array field emission triode structure. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of the pointed cone array field emission triode structure. Silicon substrate (1) Oxidation layer (2) Metal cone (6)