• 专利标题:   Method for constructing photonic device e.g. electro-optical switch, involves etching seed layer to form first electrode separated from second electrode, and depositing second cladding layer on first electrode and second electrode.
  • 专利号:   US2021278595-A1, WO2021178332-A1, TW202139478-A, US11391891-B2, KR2022144410-A, CA3170572-A1, CN115427855-A, TW779506-B1, EP4115221-A1, JP2023516398-W
  • 发明人:   KUMAR N
  • 专利权人:   PSIQUANTUM CORP, PSIQUANTUM CORP, KUMAR N, QUANTUM CORP, PSIQUANTUM CORP
  • 国际专利分类:   G02B006/132, G02B006/036, G02B006/293, G02B006/12, G02F001/035, B82Y020/00, H01L021/20, H01L021/283, H01L021/302, H01L031/18, G02B006/13, B82Y010/00
  • 专利详细信息:   US2021278595-A1 09 Sep 2021 G02B-006/293 202180 English
  • 申请详细信息:   US2021278595-A1 US189050 01 Mar 2021
  • 优先权号:   US984759P, US189050, CA3170572, KR733781, CN80028260

▎ 摘  要

NOVELTY - The method involves receiving a first wafer that comprises a first layer stack. The first layer stack comprises a substrate layer (1202), a seed layer (1204) arranged on the substrate layer, and an electro-optic layer (1206) arranged on the seed layer. A second wafer is received. The first layer stack is bonded to the second wafer. The substrate layer is removed. The seed layer is etched to form a first electrode separated from a second electrode. A second cladding layer is deposited on the first electrode and the second electrode. The second cladding layer is etched to expose a first portion of the first electrode. The second cladding layer is etched to expose a second portion of the second electrode. USE - Method for constructing electro-optical devices such as electro-optical switch or phase shifter with ridge waveguide positioned on electrodes. ADVANTAGE - The electro-optic (EO) modulator and switches can be fabricated in a simple and cost-effective manner. The EO modulators and switches are fabricated with improved optical properties and/or optical properties of the waveguide structure. The device is fabricated with reduced thickness of the first and second slab layers, so that the device can be manufactured in a cost effective manner, thus reducing the manufacturing cost of the device. The electrode layer is etched to expose a portion of the electro- optic layer and split the electrode layer into a first electrode separated from a second electrode, and the first cladding layer is deposited on the exposed portion of electro-electrode layer and the electrodes, so as to provide a starting point for further fabrication steps, thus improving the fabrication of the EO device in an efficient manner. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the optical switch. Substrate layer (1202) Seed layer (1204) Electro-optic layer (1206) Cladding layer (1208) Ridge waveguide structure (1224)