• 专利标题:   Preparing passivation film used in display device, involves generating first plasma to form buffer layer with inorganic film on graphene layer, generating second plasma to form passivation layer and setting with buffer layer inorganic film.
  • 专利号:   KR1827854-B1
  • 发明人:   SEUNG H K, BUN H K, KWANG S P
  • 专利权人:   JUSUNG ENG JH
  • 国际专利分类:   H01L051/52, C23C016/34, C23C016/40, H01L021/02, H01L027/32, H01L051/00
  • 专利详细信息:   KR1827854-B1 29 Mar 2018 H01L-051/52 201825 Pages: 17
  • 申请详细信息:   KR1827854-B1 KR172539 16 Dec 2016
  • 优先权号:   KR172539

▎ 摘  要

NOVELTY - Preparing passivation film involves generating first plasma to form buffer layer including inorganic film on the graphene layer. The second plasma is generated to form passivation layer, which is set with inorganic film on the buffer layer to obtain desired product, where the power for generating the first plasma is lower than the power for generating the second plasma. USE - Method for preparing passivation film used in display device (claimed). ADVANTAGE - The method enables to prepare passivation film, which has hydrophilic property, improved bonding force between the graphene layer and buffer layer, high-density and has improved effect of preventing air and moisture penetration. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for display device, which comprises passivation film, substrate, and display portion formed on the substrate, where the passivation film covers the substrate including the display portion.