• 专利标题:   Growing single crystal gallium nitride film on arbitrary self-supporting substrate involves nitride deposition on any self-supporting substrate, transferring the two-dimensional material with single crystal hexagonal structure.
  • 专利号:   CN113206003-A, CN113206003-B
  • 发明人:   YANG X, SHEN B, LIU D, SHEN J, CAI Z, CHEN Z, MA C
  • 专利权人:   UNIV PEKING
  • 国际专利分类:   C30B023/02, C30B025/18, C30B029/40, H01L021/02
  • 专利详细信息:   CN113206003-A 03 Aug 2021 H01L-021/02 202182 Pages: 8 Chinese
  • 申请详细信息:   CN113206003-A CN10370494 07 Apr 2021
  • 优先权号:   CN10370494

▎ 摘  要

NOVELTY - Growing single crystal gallium nitride film on arbitrary self-supporting substrate involves nitride deposition on any self-supporting substrate, transferring the two-dimensional material with a single crystal hexagonal structure to a substrate deposited with nitride, growing aluminum nitride nucleation layer on single crystal hexagonal two-dimensional material, epitaxially growing gallium nitride single crystal film on the aluminum nitride nucleation layer. USE - Method for growing single crystal gallium nitride film on arbitrary self-supporting substrate. ADVANTAGE - The method has good repeatability, realizes growth of single crystal gallium nitride film on any self-supporting substrate, in simple manner.