• 专利标题:   Field effect estimate CVD method for increasing graphene migration rate of copper foil, involves determining migration rate of graphene, and sending grid voltage to grid medium silicon dioxide to obtain unit area capacitance.
  • 专利号:   CN104392945-A
  • 发明人:   DENG J, GUO W, LIU Q, XU C, XU K, ZHU Y
  • 专利权人:   UNIV BEIJING TECHNOLOGY
  • 国际专利分类:   H01L021/205, H01L021/336, H01L021/66
  • 专利详细信息:   CN104392945-A 04 Mar 2015 H01L-021/66 201530 Pages: 7 Chinese
  • 申请详细信息:   CN104392945-A CN10602373 31 Oct 2014
  • 优先权号:   CN10602373

▎ 摘  要

NOVELTY - The method involves providing a graphene with a PMM thin film for hot plate baking in acetone. PMMA glue is removed to take out nitrogen blowing dry. A semiconductor characteristic test is performed. A grid voltage is supplied with a substrate silicon piece. A back source electrode and a drain electrode are connected with the substrate silicon piece. Leakage electric current amount along with change of the grid voltage is determined. A migration rate of the graphene is determined. The grid voltage is sent to a grid medium silicon dioxide to obtain unit area capacitance. USE - Field effect estimate CVD method for increasing a graphene migration rate of a copper foil. ADVANTAGE - The method enables simplifying a process step, reducing cost and avoiding photo-etching for graphene influence. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating a field effect estimate CVD method. '(Drawing includes non-English language text)'