▎ 摘　　要

NOVELTY - The modulator has an input waveguide (2) and an output waveguide (3) buried in a first insulating material layer (1). A sub-wavelength structure is buried in the first insulating material layer between the input waveguide and the output waveguide. A second insulating material layer (7) is arranged above the first insulating material layer to cover the sub-wavelength structure along X-direction. A third insulating material layer (10) is arranged above the second insulating material layer to cover the second insulating material layer along X-direction. The third insulating material layer is connected with a metal electrode along Y-direction. USE - Graphene electro-optical modulator. ADVANTAGE - The modulator utilizes the sub-wavelength waveguide structure to realize effective refractive index lower than ordinary waveguide, and weaken binding effect on light, and improve modulation efficiency by order of magnitude, and reduces size of modulator by order of magnitude and insertion loss so as to realize ultra-miniaturization and high integration of the modulator. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a graphene electro-optical modulator. Insulating material layers (1, 7, 10) Input waveguide (2) Output waveguide (3)