▎ 摘 要
NOVELTY - The sensor has a main body provided with a substrate (1), an insulating layer (2), a square flat diaphragm (3), a first graphene resonant working beam (4) and a second graphene resonant working beam (5). A surface of the substrate is covered with the insulating layer. A rectangular shallow central region of the insulating layer is formed with the square flat diaphragm. The first graphene resonant working beam and the second graphene resonant working beam are arranged on two rectangular short sides of on the insulating layer to form a dual-end clamped resonant beam. USE - Graphene dual resonant beam type pressure sensor. ADVANTAGE - The sensor has high sensing ability so as to realize pseudo differential measurement, eliminates influence caused by environmental factors such as temperature so as to improve measuring precision and stability. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a graphene dual resonant beam type pressure sensor. Substrate (1) Insulating layer (2) Square flat diaphragm (3) Graphene resonant working beams (4, 5)