• 专利标题:   Graphene dual resonant beam type pressure sensor, has first graphene resonant working beam and second graphene resonant working beam arranged on two rectangular short sides of on insulating layer to form dual-end clamped resonant beam.
  • 专利号:   CN106918420-A, CN106918420-B
  • 发明人:   FAN S, ZHAO P, XING W
  • 专利权人:   UNIV BEIHANG, UNIV BEIHANG
  • 国际专利分类:   G01L019/04, G01L007/08, G01L009/00
  • 专利详细信息:   CN106918420-A 04 Jul 2017 G01L-007/08 201759 Pages: 9 Chinese
  • 申请详细信息:   CN106918420-A CN10263654 21 Apr 2017
  • 优先权号:   CN10263654

▎ 摘  要

NOVELTY - The sensor has a main body provided with a substrate (1), an insulating layer (2), a square flat diaphragm (3), a first graphene resonant working beam (4) and a second graphene resonant working beam (5). A surface of the substrate is covered with the insulating layer. A rectangular shallow central region of the insulating layer is formed with the square flat diaphragm. The first graphene resonant working beam and the second graphene resonant working beam are arranged on two rectangular short sides of on the insulating layer to form a dual-end clamped resonant beam. USE - Graphene dual resonant beam type pressure sensor. ADVANTAGE - The sensor has high sensing ability so as to realize pseudo differential measurement, eliminates influence caused by environmental factors such as temperature so as to improve measuring precision and stability. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a graphene dual resonant beam type pressure sensor. Substrate (1) Insulating layer (2) Square flat diaphragm (3) Graphene resonant working beams (4, 5)