• 专利标题:   Manufacturing graphene electronic device involves making metal compound layer and catalyst layer on substrate, growing graphene layer on the catalyst layer, and converting the catalyst layer into a portion of the metal compound layer.
  • 专利号:   US2013171781-A1, KR2013079051-A, US10157989-B2
  • 发明人:   LEE C S, KIM S W, PARK S J, SEO D, YUN Y J, LEE Y H, LEE C, PARK S, YUN Y
  • 专利权人:   SAMSUNG ELECTRONICS CO LTD, SAMSUNG ELECTRONICS CO LTD, SAMSUNG ELECTRONICS CO LTD, LEE C S, KIM S W, PARK S J, SEO D, YUN Y J, LEE Y H
  • 国际专利分类:   H01L021/329, H01L021/336, H01L029/78, H01L029/00, H01L021/00, H01L029/423, H01L029/66, H01L029/778, H01L029/861, H01L029/16, H01L029/786
  • 专利详细信息:   US2013171781-A1 04 Jul 2013 H01L-021/336 201347 Pages: 12 English
  • 申请详细信息:   US2013171781-A1 US478548 23 May 2012
  • 优先权号:   KR000304

▎ 摘  要

NOVELTY - Manufacturing a graphene electronic device involves forming a metal compound layer and a catalyst layer on a substrate (310), where the catalyst layer includes a metal element in the metal compound layer; growing a graphene layer on the catalyst layer; and converting the catalyst layer into a portion of the metal compound layer. The method also involves forming source and drain electrodes (340,350) on the graphene layer; forming an insulating layer on the graphene layer; and forming a gate electrode (360) on the insulating layer. USE - For manufacturing a graphene electronic device (claimed). ADVANTAGE - The catalyst layer is used for growing the graphene layer can be combined with another element to form a semiconductor or an insulator that forms a part of the graphene electronic device. Therefore, the catalyst layer can not be removed and a process of forming a separate semiconductor layer of an insulating layer instead of the metal compound layer can be omitted, thereby simplifying the manufacturing process of the electronic device. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for graphene electronic device comprising a metal compound layer on a substrate; and a graphene layer on the substrate, where the metal compound layer includes a metal element configured to serve as a catalyst for growing the graphene layer. DESCRIPTION OF DRAWING(S) - The figure shows a schematic sectional view of a thin film transistor. Thin film transistor (300) Substrate (310) Bottom insulating layer (320) Semiconductor layer (330) Source and drain electrodes (340,350) Gate insulating layer (360) Gate electrode (370)