▎ 摘 要
NOVELTY - Method (m1) of forming a graphene device, comprises: forming a graphene film (100) over a substrate; depositing, by gas phase deposition, a polymer material covering a surface of the graphene film; and removing the substrate from the graphene film. The polymer material forms a support (102) for the graphene film. USE - The methods are useful for: forming a graphene device and a sensor device (claimed). ADVANTAGE - The methods: utilize parylene as the polymer material which can be stretch by up to 200% before breaking, and is capable of remaining flexible over a relatively wide temperature range; do not require transfer operation; reduce the risk that the properties of the graphene film will be degraded; have the polymer layer that supports the graphene film, helping to maintain relative high conductive properties of the graphene film as it is removed from the mold; and have the polymer coating that provides a support layer that remains flexible while holding a graphene electrode in a suitable position for detecting an event e.g. a key stroke. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for: (1) a method (m2) of forming a sensor device to be placed over a three-dimensional form, by using above method (m1), where the substrate on which the graphene film is formed comprises a mold having the shape of the three-dimensional form; and (2) a sensor device comprising the graphene film covered on at least one side by the polymer material having, on a portion of its inside surface, a detection element formed of the graphene film, where the polymer material contacts with and supports the graphene film. DESCRIPTION OF DRAWING(S) - The figure shows a cross sectional view of a graphene device. Graphene film (100) Support (102)