• 专利标题:   Forming a graphene device, used to form sensor device, comprises forming a graphene film over a substrate, depositing a polymer material covering a surface of the film, by gas phase deposition, and removing the substrate from the film.
  • 专利号:   FR3033554-A1, WO2016142400-A1, EP3268312-A1, CN107667071-A, US2018057361-A1
  • 发明人:   KALITA D, BOUCHIAT V, MARTY L, BENDIAB N
  • 专利权人:   CENT NAT RECH SCI, UNIV GRENOBLE FOURIER JOSEPH, UNIV GRENOBLE ALPES, UNIV GRENOBLE FOURIER JOSEPH
  • 国际专利分类:   B82Y015/00, C01B031/04, G06F003/01, C01B032/186, C01B032/194, B32B027/12, G06F003/042
  • 专利详细信息:   FR3033554-A1 16 Sep 2016 C01B-031/04 201665 Pages: 30 French
  • 申请详细信息:   FR3033554-A1 FR051931 09 Mar 2015
  • 优先权号:   FR051931

▎ 摘  要

NOVELTY - Method (m1) of forming a graphene device, comprises: forming a graphene film (100) over a substrate; depositing, by gas phase deposition, a polymer material covering a surface of the graphene film; and removing the substrate from the graphene film. The polymer material forms a support (102) for the graphene film. USE - The methods are useful for: forming a graphene device and a sensor device (claimed). ADVANTAGE - The methods: utilize parylene as the polymer material which can be stretch by up to 200% before breaking, and is capable of remaining flexible over a relatively wide temperature range; do not require transfer operation; reduce the risk that the properties of the graphene film will be degraded; have the polymer layer that supports the graphene film, helping to maintain relative high conductive properties of the graphene film as it is removed from the mold; and have the polymer coating that provides a support layer that remains flexible while holding a graphene electrode in a suitable position for detecting an event e.g. a key stroke. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for: (1) a method (m2) of forming a sensor device to be placed over a three-dimensional form, by using above method (m1), where the substrate on which the graphene film is formed comprises a mold having the shape of the three-dimensional form; and (2) a sensor device comprising the graphene film covered on at least one side by the polymer material having, on a portion of its inside surface, a detection element formed of the graphene film, where the polymer material contacts with and supports the graphene film. DESCRIPTION OF DRAWING(S) - The figure shows a cross sectional view of a graphene device. Graphene film (100) Support (102)