▎ 摘 要
NOVELTY - The photodetector has a silicon waveguide (500) and a first metal electrode (200) that are laid on upper surface of a substrate (600). The upper surface of the silicon waveguide is provided with a heterojunction composed of a black arsenic phosphorus film (400) and a graphene film (300) in contact. The upper surface of the heterojunction is provided with a second metal electrode (100). A portion of the graphene film extends away from the silicon waveguide and is in contact with the upper surface of the first metal electrode. The first and second metal electrodes are made of gold, silver or copper. The substrate is made of silicon dioxide. The graphene film is a single-layer graphene. USE - Photodetector of mixed plasma waveguide. ADVANTAGE - The photodetector has high response sensitivity and high detection efficiency. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of the photodetector. Second metal electrode (100) First metal electrode (200) Graphene film (300) Black arsenic phosphorus film (400) Silicon waveguide (500) Substrate (600)