▎ 摘　　要

NOVELTY - The utility model claims a metal nanometer antenna reinforced ultra-compact graphene electro-optic modulator, belonging to the technical field of integrated photonic device, comprising an SOI substrate, and etching on the silicon waveguide layer, a low-refractive index medium cladding, single-layer graphene, insulating medium layer sandwiched between the single layer graphene and silicon waveguide and metal nanometer antenna array layer, single layer graphene external metal external metal formed bottom electrode as the top electrode and the thin epitaxial silicon, graphene layer can be between the insulating medium layer on the nanometer antenna array top. This utility model is based on the local electromagnetic field of the infrared wave band graphene electrical adjustable property and metal nano-antenna resonant enhancement characteristics to realize the coupling enhancement of graphene and light, and it is expected to be used for large data center, Internet of things, Cloud Computing and other fields.