• 专利标题:   Making nanostructure involves forming graphene layer, forming block copolymer template layer on graphene layer and precursor pattern of metal coupled to block copolymer template layer, and forming metal nanopattern on graphene layer.
  • 专利号:   US2014225067-A1, KR2014102566-A, US9029252-B2
  • 发明人:   KIM U, KIM J, ROH Y, PARK S, PARK Y, YOO S, LEE C, LEE J, CHEON S, KIM U J, KIM J E, ROH Y G, PARK S J, PARK Y S, YOO S M, LEE C W, LEE J S, CHEON S M
  • 专利权人:   UNIST ACADIND RES CORP, SAMSUNG ELECTRONICS CO LTD, SAMSUNG ELECTRONICS CO LTD, UNIST ACADIND RES CORP, SAMSUNG ELECTRONICS CO LTD, UNIST ACADIND RES CORP
  • 国际专利分类:   H01L021/283, H01L031/0224, H01L031/028, B82B003/00, G01J001/00, H01L031/10, H01L021/22, H01L021/38, H01L021/4763, H01L027/14
  • 专利详细信息:   US2014225067-A1 14 Aug 2014 H01L-031/0224 201455 Pages: 41 English
  • 申请详细信息:   US2014225067-A1 US178566 12 Feb 2014
  • 优先权号:   KR016058

▎ 摘  要

NOVELTY - Manufacturing a nanostructure, involves preparing a graphene layer (GP100); forming a block copolymer template layer directly on the graphene layer and a precursor pattern of metal coupled to the block copolymer template layer; and forming a metal nanopattern on the graphene layer by removing the block copolymer template layer and reducing the precursor pattern. USE - For manufacturing a nanostructure which is used in making an optical device i.e. a plasmonic multi-band photodetector (claimed). ADVANTAGE - The method is suitable for manufacturing flexible and stretchable device; and is simple and provides improved productivity. DETAILED DESCRIPTION - Manufacturing a nanostructure, involves preparing a graphene layer, forming a block copolymer template layer directly on the graphene layer and a precursor pattern of metal coupled to the block copolymer template layer, and forming a metal nanopattern on the graphene layer by removing the block copolymer template layer and reducing the precursor pattern; or preparing a graphene layer, forming a block copolymer template layer on the graphene layer, modifying a shape of the block copolymer template layer, forming a precursor pattern of metal coupled to the modified block copolymer template layer, and forming a metal nanopattern on the graphene layer by removing the block copolymer template layer and reducing the precursor pattern; or preparing an underlayer, forming a multi-component block copolymer template layer and a multi-component metal precursor pattern coupled to the multi-component block copolymer template layer on the underlayer, and forming a multi-component metal nanopattern (NP200) on the underlayer by removing the multi-component block copolymer template layer and reducing the multi-component metal precursor pattern. The step of forming the block copolymer template layer directly on the graphene layer includes mixing a block copolymer comprising a hydrophobic first polymer and a hydrophilic second polymer, and a hydrophobic solvent. INDEPENDENT CLAIMS are included for the following: (1) manufacturing an optical device, involving forming a nanostructure including a metal nanopattern on a graphene layer by using the method of making nanostructure, and forming first and second electrodes (E100, E200) contacting the nanostructure; and (2) an optical device comprising a carbon nanomaterial layer, a multi-component metal nanopattern formed on the carbon nanomaterial layer, and first and second electrodes respectively contacting first and second regions of the carbon nanomaterial layer on which the multi-component metal nanopattern is formed. DESCRIPTION OF DRAWING(S) - The figure shows a plan view of a nanostructure and a device (optical device) including the nanostructure. Graphene layer (GP100) First metal element (M100) Second metal element (M200) Multi-component metal nanopattern (NP200) Substrate (SUB100)