• 专利标题:   Phase change memory device for use in integrated circuits, has graphene layer formed on lower electrode, phase change material layer formed on graphene layer and insulating layer, and upper electrode placed on phase change material layer.
  • 专利号:   US2016276585-A1, KR2016113517-A, US9583702-B2
  • 发明人:   KIM Y, AHN C, SOOD A, POP E, WONG H S P, GOODSON K E, FONG S, LEE S, NEUMANN C M, ASHEGHI M, KIM Y S, AHN C Y, LEE S H, WONG H P
  • 专利权人:   SAMSUNG ELECTRONICS CO LTD, UNIV LELAND STANFORD JUNIOR
  • 国际专利分类:   H01L045/00, H01L021/20, H01L021/4763, H01L023/52, H01L029/06
  • 专利详细信息:   US2016276585-A1 22 Sep 2016 H01L-045/00 201665 Pages: 17 English
  • 申请详细信息:   US2016276585-A1 US011199 29 Jan 2016
  • 优先权号:   US135816P, US011199

▎ 摘  要

NOVELTY - The device (100) has an insulating layer (110) enclosing a lower electrode (120). A graphene layer (130) is formed on the lower electrode. A phase change material layer (140) is formed on the graphene layer and the insulating layer. An upper electrode (150) is placed on the phase change material layer. The phase change material layer comprises germanium antimony tellurium (GST) material. The graphene layer covers the lower electrode and covers a part of the insulating layer. Width of the graphene layer is equal to width of the lower electrode. USE - Phase change memory device for use in microelectronic devices such as integrated circuits. ADVANTAGE - The device heats phase change material at small amount of current to be changed into a crystalline state or an amorphous state so as to reduce power consumption, while reducing loss of heat transferred to the phase change material layer. The graphene layer is formed between the phase change material layer and the lower electrode to efficiently transfer heat energy formed from the lower electrode to the phase change material layer so as to lower driving current of the memory device. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for fabricating a phase change memory device. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of a structure of a phase change memory device. Phase change memory device (100) Insulating layer (110) Lower electrode (120) Graphene layer (130) Phase change material layer (140) Upper electrode (150)