• 专利标题:   Determining optimal ratio of metal atoms in two-dimensional material growth alloy catalyst comprises e.g. forming first metal catalyst layer, forming second metal catalyst layer, and annealing to fuse first and second metal catalyst layers.
  • 专利号:   CN113046719-A, CN113046719-B
  • 发明人:   CHENG C, LI L, CHEN H, HUANG B
  • 专利权人:   JIANGSU JITRI BRAIN MACHINE FUSION INTEL
  • 国际专利分类:   C23C016/02, C23C016/26, C23C016/32
  • 专利详细信息:   CN113046719-A 29 Jun 2021 C23C-016/02 202157 Pages: 7 Chinese
  • 申请详细信息:   CN113046719-A CN10282908 16 Mar 2021
  • 优先权号:   CN10282908

▎ 摘  要

NOVELTY - Determining optimal ratio of metal atoms in two-dimensional material growth alloy catalyst comprises (i) forming first metal catalyst layer with thickness gradually increasing along predetermined direction on surface of insulating substrate, (ii) forming second metal catalyst layer whose thickness gradually decreases along predetermined direction on surface of first metal catalyst layer, (iii) annealing to fuse first and the second metal catalyst layers to form an alloy catalyst layer, and making ratio of first metal atom and the second metal atom in the alloy catalyst layer gradually increase along the predetermined direction, (iv) using chemical vapor deposition method to grow two-dimensional material on surface of alloy catalyst layer, and (v) determining best position of the growth quality of the two-dimensional material on alloy catalyst layer, and determining optimal ratio of the metal atoms in the two-dimensional material growth alloy catalyst. USE - The method is useful for determining optimal ratio of metal atoms in two-dimensional material growth alloy catalyst. ADVANTAGE - The method: enables determining the best proportion of metal atoms in the two-dimensional material growth alloy catalyst with improved efficiency and reduced experiment times.