• 专利标题:   Preparing two-dimensional semiconductor field-effect transistor useful for integrated circuit comprises transferring metal/buffer material composite electrode to other surface of two-dimensional semiconductor material in two-dimensional semiconductor material/back gate electrode stack opposite.
  • 专利号:   CN115831761-A
  • 发明人:   WU Y, LIU K
  • 专利权人:   UNIV TSINGHUA
  • 国际专利分类:   H01L021/34, H01L021/44, H01L029/417, H01L029/78
  • 专利详细信息:   CN115831761-A 21 Mar 2023 H01L-021/44 202330 Chinese
  • 申请详细信息:   CN115831761-A CN10082579 14 Jan 2023
  • 优先权号:   CN10082579

▎ 摘  要

NOVELTY - Preparing a two-dimensional semiconductor field-effect transistor comprises (i) providing metal electrode pattern film, (ii) transferring the metal electrode pattern film onto the surface of the two-dimensional buffer material to obtain a metal electrode pre-patterned buffer material with a metal electrode pattern film bonded to the surface of the two-dimensional buffer material, (iii) using metal electrode pattern film as a mask, etching metal electrode pre-patterned buffer material to pattern the two-dimensional buffer material, (iv) transferring two-dimensional semiconductor material to the back gate electrode, and (v) transferring the metal/buffer material composite electrode to other surface of the two-dimensional semiconductor material in the two-dimensional semiconductor material/back gate electrode stack opposite to the surface the back gate electrode, placing the two-dimensional buffer material between the metal electrode and the two-dimensional semiconductor material. USE - The method for preparing a two-dimensional semiconductor field-effect transistor is useful for integrated circuit (claimed). ADVANTAGE - The method reduces the Schottky barrier by weakening the pinning of the Fermi level, and has good electrical properties. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a two-dimensional semiconductor field-effect transistor prepared above method.